High-power excimer laser with excellent energy stability

Kazuhiro Hirata; Kazuhiro Saida; Hiroyuki Kato

doi:10.1117/12.380860

3 April 2000 High-power excimer laser with excellent energy stability

Kazuhiro Hirata, Kazuhiro Saida, Hiroyuki Kato

Proceedings Volume 3889, Advanced High-Power Lasers; (2000) https://doi.org/10.1117/12.380860
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

A 200 watts excimer laser with excellent energy stability has been developed. The laser is based on the XMR model 5300, and thorough improvements were made over the XMR5300. The laser can produce a stable output of 200 watts (667 mJ, 300 Hz) under servo-controlled operation over 24 hours (greater than 25 million pulses). During this operation, the output fluctuation was found to be less than 1.5% for (sigma) and 10% for peak to peak. Horizontal and vertical beam divergences were less than 1 mrad and 4 mrad, respectively.

Citation Download Citation

Kazuhiro Hirata, Kazuhiro Saida, and Hiroyuki Kato "High-power excimer laser with excellent energy stability", Proc. SPIE 3889, Advanced High-Power Lasers, (3 April 2000); https://doi.org/10.1117/12.380860

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available