Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser

Ramon M. Hofstra; John C.M. Timmermans; Hubert J. G. Van Heel

doi:10.1117/12.380908

3 April 2000 Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser

Ramon M. Hofstra, John C.M. Timmermans, Hubert J. G. Van Heel

Proceedings Volume 3889, Advanced High-Power Lasers; (2000) https://doi.org/10.1117/12.380908
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.

Citation Download Citation

Ramon M. Hofstra, John C.M. Timmermans, and Hubert J. G. Van Heel "Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser", Proc. SPIE 3889, Advanced High-Power Lasers, (3 April 2000); https://doi.org/10.1117/12.380908

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