Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes

Anthony J. Walton; David G. Vass; Ian Underwood; Georg K.H. Bodammer; David Calton; Kris Seunarine; J. Tom M. Stevenson; Alan M. Gundlach

doi:10.1117/12.364442

29 September 1999 Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes

Anthony J. Walton, David G. Vass, Ian Underwood, Georg K.H. Bodammer, David Calton, Kris Seunarine, J. Tom M. Stevenson, Alan M. Gundlach

Author Affiliations +

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364442
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Liquid-crystal over silicon is an established technology for reflective spatial light modulators and microdisplays. This paper reviews their development to date, highlighting in particular the micromachining of the mirror array and the associated packaging issues.

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Anthony J. Walton, David G. Vass, Ian Underwood, Georg K.H. Bodammer, David Calton, Kris Seunarine, J. Tom M. Stevenson, and Alan M. Gundlach "Review of the history and technology of micromachined miniature displays using foundry-produced silicon backplanes", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364442

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