New methods of defect-enhanced quantum well intermixing and demonstrated integrated distributed-feedback laser modulator

David A. Thompson; John F. Hazell; Alex Siew-Wan Lee; Tao Yin; Gregory J. Letal; Brad J. Robinson; Nicholas Bertsch; John G. Simmons

doi:10.1117/12.392137

11 July 2000 New methods of defect-enhanced quantum well intermixing and demonstrated integrated distributed-feedback laser modulator

David A. Thompson, John F. Hazell, Alex Siew-Wan Lee, Tao Yin, Gregory J. Letal, Brad J. Robinson, Nicholas Bertsch, John G. Simmons

Author Affiliations +

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392137
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

New methods of implementing quantum well intermixing (QWI) in InP-based materials using defect-enhanced diffusion are presented and compared to the widely reported technique employing dielectric (usuall SiO₂) capping with subsequent rapid thermal anneal (RTA) treatments. The new methods discussed use InP layers grown either at low temperature by gas-source molecular beam epitaxy (GSMBE) or using He-plasma-assisted GSMBE where growth surface is subjected to a continuous low energy He-plasma generated in an electron cyclotron resonance (ECR) source. The two new QWI processes, and the SiO₂ capping method, are applied to a 1.55(mu) m InGaAsP multiple quantum well laser structure. For application of the QWI process the laser structure growths are interrupted in a manner and location appropriate to carrying out the QWI process and subsequent grating etch for the fabrication of a distributed feedback (DFB) laser. After implementing the QWI and grating etch, growth on the top cladding and contact layers completes the device structure. Finally, the fabrication of a DFB laser with an integrated electro-absorption (EA) modulator is described and the resultant characteristics given.

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David A. Thompson, John F. Hazell, Alex Siew-Wan Lee, Tao Yin, Gregory J. Letal, Brad J. Robinson, Nicholas Bertsch, and John G. Simmons "New methods of defect-enhanced quantum well intermixing and demonstrated integrated distributed-feedback laser modulator", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392137

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