Comparison of PbTiO3 and BaTiO3 buffer layers for sol-gel-derived PZT thin films

Laiqing Luo; Jinrong Cheng; Zhongyan Meng

doi:10.1117/12.408353

29 November 2000 Comparison of PbTiO₃ and BaTiO₃ buffer layers for sol-gel-derived PZT thin films

Laiqing Luo, Jinrong Cheng, Zhongyan Meng

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408353
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Pb(Zr,Ti)O₃ (PZT) thin films with different thickness of PbTiO₃ (PT) and BaTiO₃ (BT) buffer layers were prepared by using a sol-gel spin-coating process respectively, followed by rapid thermal annealing. The experimental results indicated that both PT and BT could offer nucleation sites to lower the activation energy for the crystallization of PZT thin films, leading to a low annealing temperature and that PZT thin films with PT buffer layer annealed at 600 degree(s)C for 30 min are highly oriented. The ferroelectric properties of the films are strongly affected by the buffer layer. The different microstructures and dielectric properties of PZT films with PT and BT buffer layers are discussed.

Citation Download Citation

Laiqing Luo, Jinrong Cheng, and Zhongyan Meng "Comparison of PbTiO₃ and BaTiO₃ buffer layers for sol-gel-derived PZT thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408353

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available