Microstructure and infrared optical properties of hydrogenated carbon nitride film

Jianhua Ju; Yiben Xia; Weli Zhang; Linjun Wang; Weimin Shi; Zhiming Huang; Z.F. Li; Guozheng Zeng; Dingyuan Tang

doi:10.1117/12.408324

29 November 2000 Microstructure and infrared optical properties of hydrogenated carbon nitride film

Jianhua Ju, Yiben Xia, Weli Zhang, Linjun Wang, Weimin Shi, Zhiming Huang, Z.F. Li, Guozheng Zeng, Dingyuan Tang

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408324
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Microstructure and optical properties of nitrogen doped hydrogenated carbon (a-C:H:N) film deposited by rf plasma enhanced chemical vapor deposition method were studied by AFM, Raman, FTIR and IRE spectrometer. Absorption intensities of the peaks CNH (1600 cm^-1), CN (2200 cm^-1) and NH (3250 cm^-1) in the IR spectra increase with the ratio of flux N₂/CH₄. Raman spectra show the shape of D and G band of a-C:H:N film varies slightly with the increase of N content, which means the main structures of N doped films are still diamondlike carbon films. However Gaussian fit results show that G band widens and the peak shifts to the low wavenumber in Raman spectra is that amorphous C₃N₄ structure formed in the film. AFM topographies and LFM images of a-C:H:N film confirm the amorphous C₃N₄ exists as several ten nanometers particles in the film. IRE spectra analysis results show that refractive index of the film in infrared band (2 - 14 um) slightly decreases from 1.8 to 1.6 with increased nitrogen content in the films.

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Jianhua Ju, Yiben Xia, Weli Zhang, Linjun Wang, Weimin Shi, Zhiming Huang, Z.F. Li, Guozheng Zeng, and Dingyuan Tang "Microstructure and infrared optical properties of hydrogenated carbon nitride film", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408324

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