Polarization properties of AlN single crystalline film

Yifang Yuan; Baoxue Chen; Shaofeng Qiu; Lin Chen

doi:10.1117/12.408378

29 November 2000 Polarization properties of AlN single crystalline film

Yifang Yuan, Baoxue Chen, Shaofeng Qiu, Lin Chen

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408378
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

An aluminum nitride single crystalline film on sapphire substrate was prepared by metal-organic chemical-vapor deposition. The method of waveguide measurement was employed for studying polarization properties of the single crystalline film. The theoretical analysis of polarization properties of the film and the optical properties of the TE and TM modes obtained from experimental results are given. It is first time to study on polarization properties of AlN single crystalline film.

Citation Download Citation

Yifang Yuan, Baoxue Chen, Shaofeng Qiu, and Lin Chen "Polarization properties of AlN single crystalline film", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408378

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