Molecular dynamics simulation of ablation process with ultrashort-pulsed laser

Etsuji Ohmura; Ichirou Fukumoto; Isamu Miyamoto

doi:10.1117/12.405692

6 November 2000 Molecular dynamics simulation of ablation process with ultrashort-pulsed laser

Etsuji Ohmura, Ichirou Fukumoto, Isamu Miyamoto

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405692
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Ultra-Short pulsed lasers are highly useful tools in the field of microfabrication. In microfabrication, the laser pulse usually is very short in the pico-second or subpico- second range: therefore, it is very difficult to observe the transient material processing phenomena experimentally. Over the years, the authors have conducted molecular dynamics (MD) simulation to study the ablation process with ultra-short pulsed laser irradiation. The MD method has been modified to simulate the laser ablation of metals by updating heat conduction effect by free electrons at each calculation time step. In this paper, a review of the modified MD simulations on ablation and shock phenomena for metal with pico-second laser irradiation is presented.

Citation Download Citation

Etsuji Ohmura, Ichirou Fukumoto, and Isamu Miyamoto "Molecular dynamics simulation of ablation process with ultrashort-pulsed laser", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405692

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