Supersmooth processing technology of optical elements

Xiaoli Song; Jiwu Zhang; Qiming Xin; Ying Su; Feng Yang

doi:10.1117/12.402802

6 October 2000 Supersmooth processing technology of optical elements

Xiaoli Song, Jiwu Zhang, Qiming Xin, Ying Su, Feng Yang

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402802
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

The newest achievement of super smooth processing technology of optical element bowl-feed polishing (BFP) is described. The need background and developing tendency of super-smooth optical elements are analyzed. The key problems of BFP have been found, the process parameters have been determined, and the basic method of BFP has been worked out by the study of process factors and processing principle. Φ50 mm k9 glass sample with 0.5 nm surface roughness and better than λ/8 surface shape has been processed.

Citation Download Citation

Xiaoli Song, Jiwu Zhang, Qiming Xin, Ying Su, and Feng Yang "Supersmooth processing technology of optical elements", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402802

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