Capacitive discharge excilamps with short duration of radiation pulse

Victor F. Tarasenko; Mikhail V. Erofeev; Mikhail I. Lomaev; Edward A. Sosnin; Dmitrii V. Shitz

doi:10.1117/12.432545

29 June 2001 Capacitive discharge excilamps with short duration of radiation pulse

Victor F. Tarasenko, Mikhail V. Erofeev, Mikhail I. Lomaev, Edward A. Sosnin, Dmitrii V. Shitz

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432545
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

Power characteristics of four excilamps with short-pulse duration discharge plasma radiation have been investigated experimentally. At mixture pressure of 30 Torr the radiation pulse power density has made at (lambda) approximately 222 nm 0.2 kW/cm², 0.15 kW/cm², 0.09 kW/cm² for I-, H- and L-type excilamps, respectively. The maximal radiation pulse power density was received for modernized I-type excilamp and it has made 0.3 kW/cm². It has been revealed that pulse radiation output is mostly determined by excilamp voltage value, discharge geometry, value of peaking capacitance, and gas medium density.

Citation Download Citation

Victor F. Tarasenko, Mikhail V. Erofeev, Mikhail I. Lomaev, Edward A. Sosnin, and Dmitrii V. Shitz "Capacitive discharge excilamps with short duration of radiation pulse", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432545

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