YBaCuO uncooled microbolometer IRFPA

Hideo Wada; Takanori Sone; Hisatoshi Hata; Yoshiyuki Nakaki; Osamu Kaneda; Yasuaki Ohta; Masashi Ueno; Masafumi Kimata

doi:10.1117/12.445342

10 October 2001 YBaCuO uncooled microbolometer IRFPA

Hideo Wada, Takanori Sone, Hisatoshi Hata, Yoshiyuki Nakaki, Osamu Kaneda, Yasuaki Ohta, Masashi Ueno, Masafumi Kimata

Proceedings Volume 4369, Infrared Technology and Applications XXVII; (2001) https://doi.org/10.1117/12.445342
Event: Aerospace/Defense Sensing, Simulation, and Controls, 2001, Orlando, FL, United States

Abstract

Because the semiconducting YBaCuO films which are fabricated by sputtering have a temperature coefficient of resistance (TCR) over 3%/K at room temperature, they are considered to be candidates for bolometer materials of uncooled infrared (IR) detectors. There is a problem, however, in that the resistivity of the films is over 10 (Omega) cm, which is two orders of magnitude higher than that of conventional VO_X bolometer films. To decrease the resistance of the bolometers, we researched sputtering conditions of the YBaCuO films and combined them with comb-shaped electrodes. When the YBaCuO film was deposited on these electrodes by RF magnetron sputtering at room temperature in an atmosphere of 2% O₂ and 98% Ar, it showed a resistivity of 90 Ωcm and a TCR of -3.2%/K; ultimately the YBaCuO bolometer resistance became 82 k(Omega) using the comb-shaped electrodes. The YBaCuO bolometer detector that contains an infrared absorbing membrane achieved a high fill factor of 90% and high infrared absorptance of 79%. Moreover, the detector showed a thermal conductance of 1.3x10^-7 W/K and a responsivity of 6.8x10⁵ V/W in a vacuum. The YBaCuO microbolometer FPA which we have developed has an array format of 320x240 pixels and a pixel pitch of 40 μm. The FPA showed a noise equivalent temperature difference (NETD) of 0.08 K with a prototype camera and f/1.0 optics.

Citation Download Citation

Hideo Wada, Takanori Sone, Hisatoshi Hata, Yoshiyuki Nakaki, Osamu Kaneda, Yasuaki Ohta, Masashi Ueno, and Masafumi Kimata "YBaCuO uncooled microbolometer IRFPA", Proc. SPIE 4369, Infrared Technology and Applications XXVII, (10 October 2001); https://doi.org/10.1117/12.445342

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available