Waveguide microinterferometry system for microelements investigation

Leszek A. Salbut; Michal Jozwik; Christophe Gorecki; Seung Seoup Lee

doi:10.1117/12.445596

23 October 2001 Waveguide microinterferometry system for microelements investigation

Leszek A. Salbut, Michal Jozwik, Christophe Gorecki, Seung Seoup Lee

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445596
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

In this paper the measurement concept based on full-field optical methods is presented. In order to fulfil most of the requirements connected with advanced micro element and micro material testing a waveguide micro interferometer based on grating interferometry method is proposed and described in details. The modification of this system for 3D-displacement measurements is presented. The applicability of the micro interferometer is shown at the examples of silicon beam and micro membranes testing.

Citation Download Citation

Leszek A. Salbut, Michal Jozwik, Christophe Gorecki, and Seung Seoup Lee "Waveguide microinterferometry system for microelements investigation", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445596

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