Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)

Dae Suk Kim; Jang Woo You; Soo Hyun Kim; Hong-Jin Kong; Yun Woo Lee; Won Chegal; Yoon Keun Kwak

doi:10.1117/12.427049

8 May 2001 Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)

Dae Suk Kim, Jang Woo You, Soo Hyun Kim, Hong-Jin Kong, Yun Woo Lee, Won Chegal, Yoon Keun Kwak

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427049
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

This paper describes a newly designed multipoint process monitoring system based on an acousto-optic tunable filter. In order to prove the feasibility of the suggested multipoint monitoring system for use in the NIR spectral region, some experiments were carried out in the visible range. The multipoint process monitoring system consists of an AOTF device for wavelength selecting, a CCD imaging sensor, and a specially designed in-line type of optical fiber probe. Unlike an FTS (Fourier Transform Spectrometry) based monitoring system, an AOTF has no moving parts, and it can be rapidly tuned to any wavelength in its operating range within microseconds. Thus, the AOTF is advantageous in terms of faster spectral imaging capability and rigidity required for industrial monitoring environment. Also, Fourier Transform Spectrometry experiments were conducted for comparison with the AOTF based monitoring system. In the current feasibility evaluation, an enhanced optical fiber probe with 3 monitoring points was used. However, the number of monitoring points can be easily expanded to dozens more points as required.

Citation Download Citation

Dae Suk Kim, Jang Woo You, Soo Hyun Kim, Hong-Jin Kong, Yun Woo Lee, Won Chegal, and Yoon Keun Kwak "Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427049

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