Paper
9 November 2001 Roadmap for micro-optics fabrication
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Abstract
When considering a roadmap for technology development, the essence of the problem can be framed by two simple questions: 1) Where have we been? and 2) Where do we need to go? The first question is relatively easy to answer with some research, but answering the second requires significantly more effort. In this paper, we address these questions as they relate to the fabrication of diffractive and refractive micro-optics. A brief historical overview of micro-optics fabrication is presented, followed by our predictions on the future of the field. Examples of future applications, technical challenges, and supporting technologies required for manufacturing of different types of micro-optics are discussed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas J. Suleski and Robert D. TeKolste "Roadmap for micro-optics fabrication", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448025
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Micro optics

Optics manufacturing

Manufacturing

Photomasks

Etching

Silica

Lithography

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