Multipurpose experimental station for soft x-ray microscopy on BACH beamline at Elettra

Marco Zangrando; Marco Finazzi; Michele Zacchigna; Enzo M. Di Fabrizio; Daniele Cocco; Regina Rochow-Carbone; Maya Kiskinova; Burkhard Kaulich; Ralf-Hendrik Menk; Fulvio Parmigiani

doi:10.1117/12.450956

20 December 2001 Multipurpose experimental station for soft x-ray microscopy on BACH beamline at Elettra

Marco Zangrando, Marco Finazzi, Michele Zacchigna, Enzo M. Di Fabrizio, Daniele Cocco, Regina Rochow-Carbone, Maya Kiskinova, Burkhard Kaulich, Ralf-Hendrik Menk, Fulvio Parmigiani

Author Affiliations +

Proceedings Volume 4506, Soft X-Ray and EUV Imaging Systems II; (2001) https://doi.org/10.1117/12.450956
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A new experimental station for soft x-ray microscopy is under construction at BACH beamline, at Elettra Synchrotron Radiation Facility (Italy). This station will be devoted both to scanning transmission x-ray microscopy (STXM) and photoemission microscopy (SPEM), with spatial resolution of about 50 nm. A Fresnel Zone Plate (FZP) will provide the micro-focusing of the beam delivered by the monochromator of BACH. The photon beam features are high resolving power (30000-5000 in the 40-1500 eV range), high flux (more than 10¹¹ photons/s after the exit slit) and the possibility to select the light polarization. The experimental chamber will host several photon and electron detectors which should provide spatially resolved information of the bulk and surface composition. The expected acquisition times are of the order of the seconds for STXM and less than 1 minute for SPEM. The branch line hosting this station will start from the exit slit of the BACH monochromator. A toroidal mirror will focus the exit slit-spot on a pinhole which will be the source for the following FZP. With a 10x10 micrometers ² pinhole it will be possible to obtain a spot of about 50x50 nm² with enough flux (from 10⁸ to 10⁹ ph/sec) to perform microscopic experiments with polarized radiation. In this paper we present the optical scheme of the instrument as well as the foreseen performances in terms of resolution and flux.

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Marco Zangrando, Marco Finazzi, Michele Zacchigna, Enzo M. Di Fabrizio, Daniele Cocco, Regina Rochow-Carbone, Maya Kiskinova, Burkhard Kaulich, Ralf-Hendrik Menk, and Fulvio Parmigiani "Multipurpose experimental station for soft x-ray microscopy on BACH beamline at Elettra", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); https://doi.org/10.1117/12.450956

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