Multimode interference couplers using polymeric optical waveguides

Chih-Wei Hsu; Hsuen-Li Chen; Way-Seen Wang

doi:10.1117/12.444870

19 October 2001 Multimode interference couplers using polymeric optical waveguides

Chih-Wei Hsu, Hsuen-Li Chen, Way-Seen Wang

Proceedings Volume 4579, Optical Fiber and Planar Waveguide Technology; (2001) https://doi.org/10.1117/12.444870
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

Polymeric optical waveguides are fabricated by using optical polymer benzocyclobutene BCB). The properties of BCB include good thermal stability and high optical transmission. Anisotropic etching of BCB has been characterized by reactive ion etching. The output mode distribution has been examined by CCD measurement system. Also, an optical coupler based on multimode interference (MMI) effect has been designed and fabricated. We show that such MMI couplers can offer superior properties such as low excess loss and good tolerance to the variation of wavelength. The measurement results are presented.

Citation Download Citation

Chih-Wei Hsu, Hsuen-Li Chen, and Way-Seen Wang "Multimode interference couplers using polymeric optical waveguides", Proc. SPIE 4579, Optical Fiber and Planar Waveguide Technology, (19 October 2001); https://doi.org/10.1117/12.444870

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