New feasibilities for characterizing rough surfaces by optical correlation techniques

Oleg V. Angelsky

doi:10.1117/12.455197

5 February 2002 New feasibilities for characterizing rough surfaces by optical correlation techniques

Oleg V. Angelsky

Proceedings Volume 4607, Selected Papers from Fifth International Conference on Correlation Optics; (2002) https://doi.org/10.1117/12.455197
Event: Fifth International Conference on Correlation Optics, 2001, Chernivsti, Ukraine

Abstract

New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibility for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimation of these parameters is proposed.

Citation Download Citation

Oleg V. Angelsky "New feasibilities for characterizing rough surfaces by optical correlation techniques", Proc. SPIE 4607, Selected Papers from Fifth International Conference on Correlation Optics, (5 February 2002); https://doi.org/10.1117/12.455197

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