Advances in MEMS integration with planar waveguide devices

Joel A. Kubby

doi:10.1117/12.463840

27 March 2002 Advances in MEMS integration with planar waveguide devices

Joel A. Kubby

Proceedings Volume 4654, Silicon-based and Hybrid Optoelectronics IV; (2002) https://doi.org/10.1117/12.463840
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

Ths paper reviews benefits for the integration of optical components into Photonic Light Circuits (PLC's), with a particular emphasis on the integration of optical switching elements. The requirements for the optical switches in these circuits will be discussed and the suitability of various switching technologies for meeting these requirements will be considered.

Citation Download Citation

Joel A. Kubby "Advances in MEMS integration with planar waveguide devices", Proc. SPIE 4654, Silicon-based and Hybrid Optoelectronics IV, (27 March 2002); https://doi.org/10.1117/12.463840

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