MOEMS based on the combination of moving planar waveguides and mechanical structures

Eric Ollier; Pierre Labeye; Karine Petroz

doi:10.1117/12.463850

27 March 2002 MOEMS based on the combination of moving planar waveguides and mechanical structures

Eric Ollier, Pierre Labeye, Karine Petroz

Proceedings Volume 4654, Silicon-based and Hybrid Optoelectronics IV; (2002) https://doi.org/10.1117/12.463850
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

Even if a lot of applications are today focused on optical communications, other industrial fields can also take benefit from the advantages offered by MOEMS solutions. Many Optical MEMS are based on electro-mechanical devices providing optical function, for example moving micro-mirrors for optical switches, attenuators or scanners. But LETI and a few other labs have also developed an original MOEMS technology by combining on the same substrate integrated optical planar waveguides with micro-mechanical structures. To reach this aim, a specific 'silica micro-machining' technology has been developed. Based on the moving waveguide technology, LETI have fabricated a micro-vibration sensor for the surveillance of rotating machines in electrical generators and optical switches for optical network protection and reconfiguration. Other devices are also based on silica micro-machining technology since they use moving silica optical structures, for example micro-lenses for micro-scanners. After general ideas on definitions and Optical MEMS applications, the paper continues with a short overview of the state of the art of Optical MEMS based on moving waveguides. Then it is more focused on silica on silicon technology. Specific technological problems are presented and the discussion is illustrated by the work carried out by LETI in this area.

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Eric Ollier, Pierre Labeye, and Karine Petroz "MOEMS based on the combination of moving planar waveguides and mechanical structures", Proc. SPIE 4654, Silicon-based and Hybrid Optoelectronics IV, (27 March 2002); https://doi.org/10.1117/12.463850

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KEYWORDS

Waveguides

Switches

Silica

Microopto electromechanical systems

Silicon

Optical fibers

Integrated optics

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