LCD real-time mask technique for fabrication of arbitrarily shaped microstructure

Qinjun Peng; Yongkang Guo; Bo Chen; Jinglei Du; Jinshan Xiang; Zheng Cui

doi:10.1117/12.462879

19 April 2002 LCD real-time mask technique for fabrication of arbitrarily shaped microstructure

Qinjun Peng, Yongkang Guo, Bo Chen, Jinglei Du, Jinshan Xiang, Zheng Cui

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462879
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

A new technique to fabricate arbitrarily shaped microstructures by using LCD (liquid crystal display) real- time mask is reported in this paper. Its principle and design method are explained. Based on partial coherent imaging theory, the process to fabricate micro-axicon array and zigzag grating has been simulated. The experiment using a color LCD as real-time mask has been set up. Micro-axicon array and zigzag grating has been fabricated by the LCD real-time mask technique. The 3D surface relief structures were made on pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The pitch size of zigzag grating is 46.26micrometers . The caliber of axicon is 118.7micrometers , and the etching depth is 1.332micrometers .

Citation Download Citation

Qinjun Peng, Yongkang Guo, Bo Chen, Jinglei Du, Jinshan Xiang, and Zheng Cui "LCD real-time mask technique for fabrication of arbitrarily shaped microstructure", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462879

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