MEMS Max: a new full- 3D MEMS-featured rf-FEM analysis environment

Firas Mohamed; Bachar Affour; Stephane Despreaux; B. Guillon; Patrick Giroud

doi:10.1117/12.462837

19 April 2002 MEMS Max: a new full- 3D MEMS-featured rf-FEM analysis environment

Firas Mohamed, Bachar Affour, Stephane Despreaux, B. Guillon, Patrick Giroud

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462837
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Reducing design cycle time is a main concern of CAD tools. MEMS designers particularly suffer from a long and difficult design procedure in which different phases are involved: solid modeling, meshing and simulation. In this paper, we present, MEMS Max, the new MEMSCAP environment fully oriented towards RF-MEMS designers. It brings to the designer flexible, complete and easy-to-use RF MEMS-oriented tools. At the same time, it reduces efficiently the design cycle time.

Citation Download Citation

Firas Mohamed, Bachar Affour, Stephane Despreaux, B. Guillon, and Patrick Giroud "MEMS Max: a new full- 3D MEMS-featured rf-FEM analysis environment", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462837

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