Optical Coating Materials For The Ultraviolet - Selection And Characterization

Walter T. Pawlewicz

doi:10.1117/12.942586

15 August 1984 Optical Coating Materials For The Ultraviolet - Selection And Characterization

Walter T. Pawlewicz

Proceedings Volume 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers; (1984) https://doi.org/10.1117/12.942586
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

Experiences at Pacific Northwest Laboratory in the selection, deposition and characterization of oxide optical coatings for use with excimer lasers are reviewed. Fabrication results for all-dielectric high reflectors at 248 and 308 nm are presented. Glassy or amorphous coating materials such as Si02 and Ta205 appear to be more promising for ultraviolet use than polycrystalline materials such as Y203, A1203, Zr02 and Hf02 because of reduced surface roughness. Glassy materials, formed by ion bombardment or by mixing oxides according to the method of Sanders, Farabaugh and Haller, appear to be a promising direction for future ultraviolet coating development.

Citation Download Citation

Walter T. Pawlewicz "Optical Coating Materials For The Ultraviolet - Selection And Characterization", Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); https://doi.org/10.1117/12.942586

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