Arbitrary angle measurement by grating wedge-plate interferometer and the calibration technique

Wei Tao; Zhaobang Pu; Zhitao Zhuang

doi:10.1117/12.471214

20 September 2002 Arbitrary angle measurement by grating wedge-plate interferometer and the calibration technique

Wei Tao, Zhaobang Pu, Zhitao Zhuang

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.471214
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A new method of arbitrary angle measurement with a grating wedge-plate interferometer is described here. A grating wedge-plate is introduced to the dual-frequency laser interference angle measurement system to enlarge the angle measurement range from ±10 to 360° or more in this system. The optical path and the structure of the interferometer are introduced and its advantages are analyzed. The calibration of the system and absolute zero-point determination of dynamic measurement by relative measurement method using 360° natural angle standard is also provided. Experiments of the repeatability of arbitrary angle measurement without and with self-calibration, the calibration error and the repeatability of zero-point of dynamic measurement under different rotating rates are given. The angle measurement range of the system is up to 360° and the measurement accuracy of arbitrary angles is better than 1” and can reach 0.5” for the best. The largest calibration error of the calibration curve is 0.5” and the repeatability of zero-point in dynamic measurement is related to the rotating rate of the wedge-plate for which the best is 0.3”. High precision, stability, immune to errors and self-calibration are the distinguished features of this angle interferometer.

Citation Download Citation

Wei Tao, Zhaobang Pu, and Zhitao Zhuang "Arbitrary angle measurement by grating wedge-plate interferometer and the calibration technique", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.471214

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