Toward MEMS-based infrared tunable microspectrometers

Jarek Antoszewski; John M. Dell; Thananjeyan Shivakumar; Mariusz Martyniuk; Kevin Winchester; Justin Wehner; Charles A. Musca; Lorenzo Faraone

doi:10.1117/12.476343

14 November 2002 Towards MEMS-based infrared tunable microspectrometers

Jarek Antoszewski, John M. Dell, Thananjeyan Shivakumar, Mariusz Martyniuk, Kevin Winchester, Justin Wehner, Charles A. Musca, Lorenzo Faraone

Author Affiliations +

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.476343
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Silicon nitride membrane based MEMS technologies are used in numerous optical micro-systems for many practical applications. In recent years significant effort has been invested into miniaturization of present spectrometers leading to development of compact systems based on linear detector arrays. However, further miniaturization requires the application of MEMS technology. MEMS based micro-Fabry-Perot cavity structures with a flexible mirrors operating in the visible and near infrared range have already been demonstrated. Extension of the technology to mid- (MWIR-3μm to 5μm) and long-wave infrared (LWIR - 8μm to 12μm) seems to be a natural development. However, this requires much larger deflection of the movable mirror of the Fabry-Perot cavity: ~1μm for 3μm to 5μm and ~2μm for 8μm to 12μm wavelengths range. Consequently, precise control of the intrinsic stress in the silicon nitride support film is needed. Our experiments show that suitable silicon nitride properties can be obtained by carefully controlling the process parameters during plasma enhanced CVD growth. In addition to the material requirements, the mechanical structure of the flexible mirror is also important. In order to optimize the mirror structure/shape, finite element analysis was undertaken. The results show that for certain silicon nitride support shapes and thicknesses, mirror deflections needed for both the MWIR and LWIR wavelength regions are possible.

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Jarek Antoszewski, John M. Dell, Thananjeyan Shivakumar, Mariusz Martyniuk, Kevin Winchester, Justin Wehner, Charles A. Musca, and Lorenzo Faraone "Towards MEMS-based infrared tunable microspectrometers", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.476343

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