Solar Selective Titanium Oxinitride Films Prepared By Reactive Sputtering

Egbert Vogelzang; Marten Sikkens

doi:10.1117/12.944791

2 November 1984 Solar Selective Titanium Oxinitride Films Prepared By Reactive Sputtering

Egbert Vogelzang, Marten Sikkens

Proceedings Volume 0502, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion III; (1984) https://doi.org/10.1117/12.944791
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

TiNx and TiNx0y films are deposited by DC reactive bias sputtering in an argon atmosphere with nitrogen and oxygen added as reactive gases. The DC resistivity and deposition rate of biased and non-biased layers have been determined.X-ry and eil,,ctron diffractim are used to investigate the structure of the films. Their composition was investigated using X-ray Facto-electron Spectroscopy (XPS) and Rutherford Back Scattering (RBS) combined with Nuclear Reac-tion Analysis (NRA). The optical properties are investigated in the spectral region 0.4-25 μm. Bias sputtered TiNx films show a low resistivity and a solar absorptance which is too low for practical use as a spectrally selective absorbing layer in a solar collector. Non-biased films, sputtered in an argon/nitrogen atmosphere, and TiNx0y films, bias sputtered with oxygen added to the glow discharge, show a much higher resistivity and a higher solar absorptance. The solar absorptance of spectrally selective TiNxOy/copper tandems is moderate (0.80-0.85) but their thermal emittance is low (0.05 at 1500C). Heat treatment for 12 h at 4000C in vacuum hardly affects the optical properties.

Citation Download Citation

Egbert Vogelzang and Marten Sikkens "Solar Selective Titanium Oxinitride Films Prepared By Reactive Sputtering", Proc. SPIE 0502, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion III, (2 November 1984); https://doi.org/10.1117/12.944791

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available