Accuracy limitations in specular-mode optical topography extraction

Fred Lewis Terry Jr.

doi:10.1117/12.488484

2 June 2003 Accuracy limitations in specular-mode optical topography extraction

Fred Lewis Terry Jr.

Proceedings Volume 5038, Metrology, Inspection, and Process Control for Microlithography XVII; (2003) https://doi.org/10.1117/12.488484
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Specular-mode spectroscopic ellipsometry (SE) or reflectometry (SR) from periodic gratings have been successfully demonstrated as accurate methods for extracting detailed topography of integrated circuit structures. However, as critical dimensions become very much less than the current minimum measurement wavelengths and as film thicknesses are simultaneously reduced, there are significant questions regarding the long-term usefulness of this method. In this paper, I will attempt to address some major aspects of this problem.

Citation Download Citation

Fred Lewis Terry Jr. "Accuracy limitations in specular-mode optical topography extraction", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); https://doi.org/10.1117/12.488484

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