Material-vapor dynamics during ablation with ultrashort pulses

Detlef Breitling; Klaus-Peter Mueller; Andreas Ruf; Peter Berger; Friedrich Dausinger

doi:10.1117/12.540608

18 November 2003 Material-vapor dynamics during ablation with ultrashort pulses

Detlef Breitling, Klaus-Peter Mueller, Andreas Ruf, Peter Berger, Friedrich Dausinger

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540608
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

We have studied ablation plumes generated by femtosecond and picosecond-laser pulses using various optical methods for both single-pulse ablation as well as for drilling with up to 1 kHz repetition rate. Time-resolved shadow and resonance-absorption photographs visualize the plume- and vapor-expansion behavior in the nanosecond- and microsecond-time domains whereas the detection of Mie-scattered 308 nm-radiation allows to qualify the vapor movement and accumulation up to several milliseconds, i.e. well beyond the corresponding pulse-to-pulse separation at 1 kHz repetition rate.

Citation Download Citation

Detlef Breitling, Klaus-Peter Mueller, Andreas Ruf, Peter Berger, and Friedrich Dausinger "Material-vapor dynamics during ablation with ultrashort pulses", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540608

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