Paper
1 April 2003 Growth control of polymer films deposited on the planar waveguide
Elzbieta Augusciuk, Marcin Roszko, Wojciech Fabianowski
Author Affiliations +
Abstract
Propagation of the light in a waveguide structure may be easily disturbed by the change of a cover. In this study multilayers of 7-octenylotrichlorosilane have been investigated as cover films. The multilayer films were deposited on the planar waveguide by self-assembly, followed by a UV illumination and repeated self-assembly processes. A growth control of the deposited films was performed by the generalized method of an m-line spectroscopy. M-line spectroscopy is one of the most sensitive methods of investigations of the cover materials parameters.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Elzbieta Augusciuk, Marcin Roszko, and Wojciech Fabianowski "Growth control of polymer films deposited on the planar waveguide", Proc. SPIE 5064, Lightmetry 2002: Metrology and Testing Techniques Using Light, (1 April 2003); https://doi.org/10.1117/12.501526
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Cited by 1 scholarly publication.
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KEYWORDS
Waveguides

Ultraviolet radiation

Multilayers

Planar waveguides

Silicon

Glasses

Semiconducting wafers

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