Paired interferometric measurement of planarity and parallelism

Maurizio Vannoni; Giuseppe Molesini

doi:10.1117/12.501263

30 May 2003 Paired interferometric measurement of planarity and parallelism

Maurizio Vannoni, Giuseppe Molesini

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.501263
Event: Optical Metrology, 2003, Munich, Germany

Abstract

An interferometric method to test plane parallel plates both for planarity and parallelism of the end faces is reported. The method requires that the plates are reflective or temporarily metal coated. Measurements are taken by insertion of the plates in a reference cavity. The optical configuration uses a standard programmable interferometer with an external right angle prism folding back the probe beam. The prism error is determined by cavity calibration, and is subtracted at data reduction. The measuring procedure is discussed in detail, and results of a laboratory demonstration are presented.

Citation Download Citation

Maurizio Vannoni and Giuseppe Molesini "Paired interferometric measurement of planarity and parallelism", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.501263

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