Null test measurement of high-numerical-aperture cylindrical microlenses in transmitted light

Juergen Lamprecht; Norbert Lindlein; Johannes Schwider

doi:10.1117/12.505547

22 December 2003 Null test measurement of high-numerical-aperture cylindrical microlenses in transmitted light

Juergen Lamprecht, Norbert Lindlein, Johannes Schwider

Proceedings Volume 5180, Optical Manufacturing and Testing V; (2003) https://doi.org/10.1117/12.505547
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

An interferometrical measurement method is presented for determining the quality of cylindrical micro lenses with a numerical aperture of up to 0.8 in transmitted light. In order to maximize the achievable accuracy, a null test configuration was chosen. The reference cylindrical waves are shaped by computer generated diffractive optical elements (DOEs), which are made by optical or e-beam lithography. The resulting wave front is analyzed by a fiber optic phase-shifting Mach-Zehnder-interferometer or a Shack-Hartmann wave front sensor. Besides the general setup, which is working in the near infrared (NIR), special aspects will be presented concerning the elimination of misalignment aberrations, the complete filtering of parasitic diffraction orders and the generation of an anamorphic optical transformation for increasing the lateral resolution perpendicular to the cylindrical axis. By means of experimental results the possibilities and accuracy of this technique are discussed.

Citation Download Citation

Juergen Lamprecht, Norbert Lindlein, and Johannes Schwider "Null test measurement of high-numerical-aperture cylindrical microlenses in transmitted light", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.505547

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available