Submicroradian error sources in pencil beam interferometry

Peter Z. Takacs; Shinan Qian

doi:10.1117/12.507465

22 December 2003 Submicroradian error sources in pencil beam interferometry

Peter Z. Takacs, Shinan Qian

Proceedings Volume 5180, Optical Manufacturing and Testing V; (2003) https://doi.org/10.1117/12.507465
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

As requirements for surface slope errors in synchrotron radiation beam line optics approach the 100 nrad level on a routine basis, it becomes necessary to improve the performance of metrology instrumentation to provide reliable, repeatable, and accurate measurements at this level. We have identified a number of internal error sources in the Long Trace Profiler (LTP) that affect measurement quality at this level. The LTP is sensitive to phase shifts produced within the millimeter diameter of the pencil beam probe by optical path irregularities with scale lengths on the order of a millimeter. We examine the effects of mirror surface "macroroughness" and internal glass homogeneity on the accuracy of the LTP through experiment and theoretical modeling. By careful characterization and selection of the quality of the optical components that comprise the LTP optical system, it is possible to reduce the systematic errors in the measurement to well below the 1 microradian level.

Citation Download Citation

Peter Z. Takacs and Shinan Qian "Submicroradian error sources in pencil beam interferometry", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.507465

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