Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)

Krzysztof Patorski; Agata Jozwicka; Artur Kalinowski

doi:10.1117/12.520761

6 October 2003 Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)

Krzysztof Patorski, Agata Jozwicka, Artur Kalinowski

Author Affiliations +

Proceedings Volume 5229, Laser Technology VII: Applications of Lasers; (2003) https://doi.org/10.1117/12.520761
Event: Laser Technology VII: Applications of Lasers, 2002, Szczecin, Poland

Abstract

In the paper experimental results of microbeam/cantilever vibration measurements are presented. The cantilever under investigation is used as a sensor in a Atomic Force Microscope. Double-Beam Digital Interferometry with time averaging and interferogram processing was used for optimization of vibration mode visualization. Several two-frame methods with phase step between the frames were compared with the four-frame method with phase step π/2 between consecutive frames. The experimental results obtained prove that the four-frame method is the most appropriate for further quantitative amplitude and phase analysis.

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Krzysztof Patorski, Agata Jozwicka, and Artur Kalinowski "Interferometric measurements of the vibration of a silicon microbeam/cantilever unit used in atomic force microscopy (AFM)", Proc. SPIE 5229, Laser Technology VII: Applications of Lasers, (6 October 2003); https://doi.org/10.1117/12.520761

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