E-Beam Fabrication Of Computer-Generated Holograms (CGH)

Steven M. Arnold

doi:10.1117/12.946294

12 June 1985 E-Beam Fabrication Of Computer-Generated Holograms (CGH)

Steven M. Arnold

Proceedings Volume 0523, Applications of Holography; (1985) https://doi.org/10.1117/12.946294
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

We report here the development of an integrated capability for writing computer-generated holograms (CGHs) using either of two commercially available electron-beam lithography systems. These binary, chrome-on-glass holograms have been used extensively for aspheric optical testing and also have applications to the interferometric recording of holograms. Algorithms are described for encoding CGHs for e-beam writing. Limitations of e-beam CGH fabrication are discussed. A self-contact lithography and ion milling process is described for converting chrome-on-glass holograms into 40-percent efficient, environmentally durable, all-glass holograms.

Citation Download Citation

Steven M. Arnold "E-Beam Fabrication Of Computer-Generated Holograms (CGH)", Proc. SPIE 0523, Applications of Holography, (12 June 1985); https://doi.org/10.1117/12.946294

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