Low-cost amorphous silicon-based 160x120 uncooled microbolometer 2D array for high-volume applications

Cyrille Trouilleau; Arnaud Crastes; Jean-Luc Tissot; Jean-Pierre Chatard; Jean-Jacques Yon; Astrid Astier

doi:10.1117/12.515958

19 February 2004 Low-cost amorphous silicon-based 160x120 uncooled microbolometer 2D array for high-volume applications

Cyrille Trouilleau, Arnaud Crastes, Jean-Luc Tissot, Jean-Pierre Chatard, Jean-Jacques Yon, Astrid Astier

Proceedings Volume 5251, Detectors and Associated Signal Processing; (2004) https://doi.org/10.1117/12.515958
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

Uncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Developments are focused on the improvement of their sensitivity enabling the possibility of reducing the pixel pitch in order to decrease the total system (size and weight) by using smaller optics. The amorphous silicon technology is the latest one developed by CEA / LETI and transferred to ULIS to manufacture 160 x 120 2D arrays. We developed for this device a low cost package based on existing technologies. This device is well adapted to high volume process control applications where spatial resolution (in terms of pixel number) is less important than device costs.

Citation Download Citation

Cyrille Trouilleau, Arnaud Crastes, Jean-Luc Tissot, Jean-Pierre Chatard, Jean-Jacques Yon, and Astrid Astier "Low-cost amorphous silicon-based 160x120 uncooled microbolometer 2D array for high-volume applications", Proc. SPIE 5251, Detectors and Associated Signal Processing, (19 February 2004); https://doi.org/10.1117/12.515958

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