Deformation measurement by digital holographic interferometry

Isao Takahashi; Takanori Nomura; Yoshiharu Morimoto; Satoru Yoneyama; Motoharu Fujigaki

doi:10.1117/12.515005

30 September 2003 Deformation measurement by digital holographic interferometry

Isao Takahashi, Takanori Nomura, Yoshiharu Morimoto, Satoru Yoneyama, Motoharu Fujigaki

Proceedings Volume 5264, Optomechatronic Systems IV; (2003) https://doi.org/10.1117/12.515005
Event: Photonics Technologies for Robotics, Automation, and Manufacturing, 2003, Providence, RI, United States

Abstract

Deformation measurement of a cantilever based on digital holographic interferometry is presented. The digital holograms of the cantilever before and after deformation are obtained by use of phase-shifting technique. By using the phase-shifting digital holography, the object wave information without zeroth order diffraction wave can be extracted. The phase difference of the reconstructed cantilever before and after deformation is obtained numerically using discrete Fresnel diffraction integral. Owing to the numerical analysis, the deformation of the cantilever can be obtained with high resolution of nanometer dimensions. The optical experimental results are shown to confirm our proposed method. Furthermore, we propose a mechanical movement free double-exposure method in phase-shifting digital holography using a laser diode.

Citation Download Citation

Isao Takahashi, Takanori Nomura, Yoshiharu Morimoto, Satoru Yoneyama, and Motoharu Fujigaki "Deformation measurement by digital holographic interferometry", Proc. SPIE 5264, Optomechatronic Systems IV, (30 September 2003); https://doi.org/10.1117/12.515005

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