Ultrafast laser applications in semiconductor industry

Bo Gu

doi:10.1117/12.529794

15 July 2004 Ultrafast laser applications in semiconductor industry

Bo Gu

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.529794
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

As features and dimensions become smaller, traditional laser processing in semiconductor industry are hitting its limitations due to the thermal effects inherited in long pulse processing. Ultrafast lasers become more reliable and are available commercially. However, their industrial applications, though very desirable due to their non-thermal nature processing, are only limited to those with high value added. Current status of ultrafast laser applications in semiconductor industry is reviewed. Shortcomings of current commercial systems are analyzed. Requirements for ultrafast laser based production system and future direction are discussed.

Citation Download Citation

Bo Gu "Ultrafast laser applications in semiconductor industry", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.529794

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