Nanostructure fabrication by femtosecond laser with near-field optical enhancement effect

Hiroto Takada; Masanao Kamata; Yoshihiro Hagiwara; Minoru Obara

doi:10.1117/12.546828

20 September 2004 Nanostructure fabrication by femtosecond laser with near-field optical enhancement effect

Hiroto Takada, Masanao Kamata, Yoshihiro Hagiwara, Minoru Obara

Proceedings Volume 5448, High-Power Laser Ablation V; (2004) https://doi.org/10.1117/12.546828
Event: High-Power Laser Ablation, 2004, Taos, New Mexico, United States

Abstract

We will report on nanostructure fabrication on silicon (Si) substrate by 800 nm femtosecond laser pulses. Spherical alumina particles were placed on the substrate surface. After femtosecond laser irradiation at below-ablation-threshold fluences, we have successfully observed the nanoholes formation with around 100 nm in diameter using scanning electron microscope (SEM) and atomic force microscope (AFM). The dependence of nanohole formation on the laser fluence and laser pulse number was investigated. The mechanism for the nanohole drilling is the near-field optical enhancement effect induced by interaction between local surface plasmon on the particles surface and surface plasmon polariton on the Si substrate surface.

Citation Download Citation

Hiroto Takada, Masanao Kamata, Yoshihiro Hagiwara, and Minoru Obara "Nanostructure fabrication by femtosecond laser with near-field optical enhancement effect", Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); https://doi.org/10.1117/12.546828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available