Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry

Xiaoping Wu; Zhaotao Liu; Hong Miao; Ping Gu

doi:10.1117/12.545254

17 August 2004 Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry

Xiaoping Wu, Zhaotao Liu, Hong Miao, Ping Gu

Author Affiliations +

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.545254
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Porous alumina thin membranes containing parallel regular pores of uniform size (nano scale) and normal to substrate surface have been prepared and fabricated. Their fine pore structure has recently made the porous films to be one of the ideal templates for synthesis of nano-structured materials and MEMS (micro-electro-mechanical systems) and separator for separation those small grains from mixed liquid. Unfortunately, the significant macro-mechanical properties of porous alumina thin membrane have not yet been understood clearly. Because the geometry of this kind membrane is multi-scale covered with mm to μm to nm, macro-mechanical behaviors of the porous alumina thin membranes belong to nonlinear mechanics. To measure and calculate those mechanical properties are difficult. Using "temporal speckle pattern interferometry" to measure successfully the large deflection vs perpendicular uniform pressure. Then the mechanical properties of the porous alumina membranes, such as elastic modulus and fracture strength, can be obtained based on plate/shell models and flexile thin membrane model. The results indicate unusual mechanical behavior of it and help us to understand the relations between microstructure and macro mechanical properties.

Citation Download Citation

Xiaoping Wu, Zhaotao Liu, Hong Miao, and Ping Gu "Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545254

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available