Paper
25 May 2004 Noise measurements in NbN semiconductors thin films deposited on sapphire
Gerard Leroy, Joel Gest, Lode K. J. Vandamme, Olivier Bourgeois
Author Affiliations +
Proceedings Volume 5469, Fluctuations and Noise in Materials; (2004) https://doi.org/10.1117/12.546507
Event: Second International Symposium on Fluctuations and Noise, 2004, Maspalomas, Gran Canaria Island, Spain
Abstract
In this work, we have characterized three NbNx thin films deposited on sapphire substrate and compared their noise properties. The three films were measured in the same conditions. In the first time, the films were characterized with an impedance analyzer from 20 Hz to 1 MHz. The films are then considered as a RC dipole with a resistor R in parallel with a capacitor C. With the Nyquist formula, we calculate the noise voltage spectral density SvTh of the RC dipole considering that only the resistor R exhibits thermal noise in unbiased samples. In the second time, noise measurements were made with the samples biased. Thanks to a four contacts configuration, we checked that contact noise do not contribute to our measurements. The difference between the measured noise and the calculated thermal noise SvTh shows an extra 1/f noise without GR noise contributions. The 1/f noise in the three films extra noise is compared. These results are also compared to the noise measured on NbN thin films deposited on silicon substrate [1].
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerard Leroy, Joel Gest, Lode K. J. Vandamme, and Olivier Bourgeois "Noise measurements in NbN semiconductors thin films deposited on sapphire", Proc. SPIE 5469, Fluctuations and Noise in Materials, (25 May 2004); https://doi.org/10.1117/12.546507
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sapphire

Resistors

Thin films

Resistance

Thin film deposition

Semiconductors

Temperature metrology

Back to Top