Diffractogram Step And Repeatability Testing

Robert E. Lewis

doi:10.1117/12.954247

1 March 1974 Diffractogram Step And Repeatability Testing

Robert E. Lewis

Proceedings Volume 0055, Technological Advances in Micro and Submicro Photofabrication Imagery; (1974) https://doi.org/10.1117/12.954247
Event: Acquisition and Analysis of Pictorial Data, 1974, San Diego, United States

Abstract

By stepping opaque rectangles which are closely adjacent, the gap between edges defines a single slit which by coherent illumination produces a diffraction pattern on film. This diffractogram recording is improved by an attenuator of decreasing density away from the axis. The method applies to step and repeat error measurement, as well as mask and copy line size evaluation.

Citation Download Citation

Robert E. Lewis "Diffractogram Step And Repeatability Testing", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954247

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