Creation of carbide in critical CO2 by UV laser

Taku Arai; Takaya Uchida; Naohiro Fukuda; Yoshikazu Yoshida; Toru Maekawa

doi:10.1117/12.596534

8 October 2004 Creation of carbide in critical CO₂ by UV laser

Taku Arai, Takaya Uchida, Naohiro Fukuda, Yoshikazu Yoshida, Toru Maekawa

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596534
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

A YAG laser of 266 nm is focused just above or at the surface of a Ni substrate in a near critical CO₂ chamber. Since the compressibility of CO₂ becomes very high, strong shock waves may be produced by laser irradiation. We are going to investigate the dependence of the nano structures for nickel and CO₂ on the laser power and the focus point. After the laser radiation, we found fine grains on the Ni substrate with a scanning electron microscopy and energy dispersive X-ray spectroscopy.

Citation Download Citation

Taku Arai, Takaya Uchida, Naohiro Fukuda, Yoshikazu Yoshida, and Toru Maekawa "Creation of carbide in critical CO₂ by UV laser", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596534

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