Formation of subwavelength-laser-induced periodic surface structures by tightly focused femtosecond laser radiation

Ralph Wagner; Jens Gottmann; Alexander Horn; Ernst Wolfgang Kreutz

doi:10.1117/12.596313

8 October 2004 Formation of subwavelength-laser-induced periodic surface structures by tightly focused femtosecond laser radiation

Ralph Wagner, Jens Gottmann, Alexander Horn, Ernst Wolfgang Kreutz

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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596313
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Sub-wavelength (1/4*λ-3/4*λ) laser induced periodic surface structures are generated by irradiation of either bulk fused silica and silicon or Er:BaTiO₃ thin films by scanning a tightly focused beam (Θ = 1 μm) of femtosecond laser radiation (λ = 800 nm, t_p = 100 fs) on the surface. The ripple pattern extends coherently over many overlapping laser pulses parallel and perpendicular to the polarization of the laser radiation. The dependence of the ripple spacing on the spacing of successive pulses, the direction of polarization and the properties of the material is investigated. The evolution of the ripples is investigated by applying pulse bursts with 1 - 20 pulses. The development conditions of the stuctures are specified and possible mechanisms of ripple growth are discussed.

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Ralph Wagner, Jens Gottmann, Alexander Horn, and Ernst Wolfgang Kreutz "Formation of subwavelength-laser-induced periodic surface structures by tightly focused femtosecond laser radiation", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596313

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