Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser

Yunn-shiuan Liao; Ying-Tung Chen; Choung-Lii Chao; Yih-Ming Liu

doi:10.1117/12.592034

22 January 2005 Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser

Yunn-shiuan Liao, Ying-Tung Chen, Choung-Lii Chao, Yih-Ming Liu

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.592034
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Owing to the high bonding energy, most of the glasses are removed by photo-thermal rather than photo-chemical effect when they are ablated by the 193 or 248nm excimer lasers. Typically, the machined surface is covered by re-deposited debris and the sub-surface, sometimes surface as well, is scattered with micro-cracks introduced by thermal stress generated during the process. This study aimed to investigate the nature and extent of the surface morphology and sub-surface damaged (SSD) layer induced by the laser ablation. The effects of laser parameters such as fluence, shot number and repetition rate on the morphology and SSD were discussed. An ArF excimer laser (193 nm) was used in the present study to machine glasses such as soda-lime, Zerodur and BK-7. It is found that the melt ejection and debris deposition tend to pile up higher and become denser in structure under a higher energy density, repetition rate and shot number. There are thermal stress induced lateral cracks when the debris covered top layer is etched away. Higher fluence and repetition rate tend to generate more lateral and median cracks which propagate into the substrate. The changes of mechanical properties of the SSD layer were also investigated.

Citation Download Citation

Yunn-shiuan Liao, Ying-Tung Chen, Choung-Lii Chao, and Yih-Ming Liu "Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.592034

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