Au/Cr/IZO thin film electrode for application of thermal controllable waveguide devices

Huang-Chen Guo; Yung-Hsin Chen; Ying-Tsung Lu; Wann-Diing Tyan; Pong Lai; Cheng-Lin Yang

doi:10.1117/12.590246

4 April 2005 Au/Cr/IZO thin film electrode for application of thermal controllable waveguide devices

Huang-Chen Guo, Yung-Hsin Chen, Ying-Tsung Lu, Wann-Diing Tyan, Pong Lai, Cheng-Lin Yang

Proceedings Volume 5723, Optical Components and Materials II; (2005) https://doi.org/10.1117/12.590246
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

A Au/Cr/IZO composite thin film for application of thermal electrode of the waveguide devices is proposed. It can be fabricated easily on the glass-based waveguide devices by sputtering deposition process. The hardness and impedance properties, as well as its adhesion with the glass substrate are investigated in this study.

Citation Download Citation

Huang-Chen Guo, Yung-Hsin Chen, Ying-Tsung Lu, Wann-Diing Tyan, Pong Lai, and Cheng-Lin Yang "Au/Cr/IZO thin film electrode for application of thermal controllable waveguide devices", Proc. SPIE 5723, Optical Components and Materials II, (4 April 2005); https://doi.org/10.1117/12.590246

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