Evaluation of tin-foil targets for debris mitigation in laser generated EUV source

Michiteru Yamaura; Shigeaki Uchida; Susumu Takemoto; Yoshinori Shimada; Hiroaki Nishimura; Shinsuke Fujioka; Keiji Nagai; Takayoshi Norimatsu; Katsunobu Nishihara; Noriaki Miyanaga; Yasukazu Izawa; Chiyoe Yamanaka

doi:10.1117/12.599155

6 May 2005 Evaluation of tin-foil targets for debris mitigation in laser generated EUV source

Michiteru Yamaura, Shigeaki Uchida, Susumu Takemoto, Yoshinori Shimada, Hiroaki Nishimura, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Chiyoe Yamanaka

Author Affiliations +

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.599155
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

It is very effective for mass-limited tin-foil targets to adapt for the EUV source. Tin-foil targets in account of formation, size, and thickness have been developed for debris mitigation. The amount of ions from targets is 40 % decreased tin-foil targets of 1μm or 5μm thickness than tin-bulk targets. The ion velocity is one order of magnitude less than bulk targets. The EUV emission spectra of tin-foil are more narrowing than bulk targets. The targets supply for high repetition rate of 10 kHz is applied for a novel method. It is called "Punch-out" method. The flight of graphite foil that it is a test targets was succeed to observe by using a gated ICCD camera. The target velocity is achieved to be about 120 m/s. This value can be applied for targets supply with high repetition rate of 10 kHz.

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Michiteru Yamaura, Shigeaki Uchida, Susumu Takemoto, Yoshinori Shimada, Hiroaki Nishimura, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, and Chiyoe Yamanaka "Evaluation of tin-foil targets for debris mitigation in laser generated EUV source", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.599155

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