A convenient method to measure the quantity of the acid generated by PAGs and acid amplifiers

Liyuan Wang; Zhanxing Chu; Liying Sheng

doi:10.1117/12.599107

4 May 2005 A convenient method to measure the quantity of the acid generated by PAGs and acid amplifiers

Liyuan Wang, Zhanxing Chu, Liying Sheng

Proceedings Volume 5753, Advances in Resist Technology and Processing XXII; (2005) https://doi.org/10.1117/12.599107
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

A convenient method was set up to measure the amounts of acid generated by PAGs and acid amplifiers based on the UV absorbance change of bromophenol blue aqueous solution with the addition of acid. The acid generating property of three different kinds of PAGs and acidolysis property of two 1-substituted cis-1,2-cyclohexanediol monosulfonates were investigated and discussed with this method. The measurements were performed in aqueous solution.

Citation Download Citation

Liyuan Wang, Zhanxing Chu, and Liying Sheng "A convenient method to measure the quantity of the acid generated by PAGs and acid amplifiers", Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); https://doi.org/10.1117/12.599107

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