New processing possibilities of materials by micro and nano precision laser machining for microelectronics applications

Dumitru Ulieru; Ileana Apostol

doi:10.1117/12.633706

7 June 2005 New processing possibilities of materials by micro and nano precision laser machining for microelectronics applications

Dumitru Ulieru, Ileana Apostol

Author Affiliations +

Proceedings Volume 5850, Advanced Laser Technologies 2004; (2005) https://doi.org/10.1117/12.633706
Event: Advanced Laser Technologies 2004, 2004, Rome and Frascati, Italy

Abstract

The permanently development of microelectronics production by continuously increasing of devices densities meantime with corresponding decreasing of processing line till further submicronic range. The processing of huge diversity of materials as metals, polymers, ceramics, silicon, germanium, other materials III-Vs, glass, diamond, hard metal oxides, composites is need. On this paper will be presented our advanced studies and of experiments realized with very good results for a full range of those materials by micro and nanoprocessing for to realize the best accuracy, according with microelectronics technical requirements specified as below: 1. The microdrilling for microvias used for MCM's, MEMS and MOEMS application. 2. The high precision microcutting and scribing used for individual chips separation Isingulation on processed wafers of micro and optoelectronics applications 3. 2D I3D processing for microlens, microlens array and microalveoles fabrication 4. Microengraving of KOP (Potasium dihydrogen phosphate) crystal by laser microablation 5. Micro and nano cleaning of thin and ultrathin layers need for production of microelectronics devices production.

Citation Download Citation

Dumitru Ulieru and Ileana Apostol "New processing possibilities of materials by micro and nano precision laser machining for microelectronics applications", Proc. SPIE 5850, Advanced Laser Technologies 2004, (7 June 2005); https://doi.org/10.1117/12.633706

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available