Effectible factors in optics profile testing

Huan Ren; Xiaodong Jiang; Zuxin Huang; Hua Xu; Wei Zhong; Ke Li

doi:10.1117/12.611795

13 June 2005 Effectible factors in optics profile testing

Huan Ren, Xiaodong Jiang, Zuxin Huang, Hua Xu, Wei Zhong, Ke Li

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.611795
Event: Optical Metrology, 2005, Munich, Germany

Abstract

As a key specification of the beam quality control, the profile of the optics requires hi-precise testing, which is indispensable during the R&D of high power laser drivers. Currently, the commercial interferometers provided by such companies as Veeco , Zygo and 4D in US and Fuji in Japanese are widely used in profile testing of optics. However, during our practice, a fairly good accordance can not be found after a series of the profile tests of the optics. Generally, there’re certain fluctuations or even remarkable difference among the testing results occurring in the testing results compared with the design specifications. In order to improve the existing poor accordance of the testing results of profile specifications of the optics, and in accordance with our repeated experiments, the Main factors that affect the profile testing are presented respectively, as well as their corresponding impacts upon the profile based on the clarified evaluation parameters and unified testing principles, which are of significant reference value to standardize the testing method of optics profile and to strictly control the optics quality.

Citation Download Citation

Huan Ren, Xiaodong Jiang, Zuxin Huang, Hua Xu, Wei Zhong, and Ke Li "Effectible factors in optics profile testing", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.611795

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