Airy-like internal reflection series applied in scatterometry and simulations of gratings

Roman Antos; Jan Mistrik; Tomuo Yamaguchi; Masahiro Horie; Stefan Visnovsky

doi:10.1117/12.612496

26 August 2005 Airy-like internal reflection series applied in scatterometry and simulations of gratings

Roman Antos, Jan Mistrik, Tomuo Yamaguchi, Masahiro Horie, Stefan Visnovsky

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580Y (2005) https://doi.org/10.1117/12.612496
Event: Optical Metrology, 2005, Munich, Germany

Abstract

The rigorous coupled wave analysis (RCWA) implemented as the Airy-like internal reflection series (AIRS) is applied in a theoretical analysis of the optical response of diffraction gratings. Detailed theoretical description of the RCWA with respect to the AIRS implementation is provided, including the application of Li's Fourier factorization rules and the recursive algorithm for sliced relief gratings. Numerical analysis of convergence properties including computation time is demonstrated for structures made of transparent, semiconductor, or metallic materials.

Citation Download Citation

Roman Antos, Jan Mistrik, Tomuo Yamaguchi, Masahiro Horie, and Stefan Visnovsky "Airy-like internal reflection series applied in scatterometry and simulations of gratings", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580Y (26 August 2005); https://doi.org/10.1117/12.612496

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