Scanning form measurement for curved surfaces

Michael Schulz; Ralf D. Geckeler

doi:10.1117/12.614790

15 September 2005 Scanning form measurement for curved surfaces

Michael Schulz, Ralf D. Geckeler

Proceedings Volume 5921, Advances in Metrology for X-Ray and EUV Optics; 592106 (2005) https://doi.org/10.1117/12.614790
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Form measurements with scanning systems are well established. Many scanning systems are limited to almost flat surface forms. In parallel, there is a need for systems capable of measuring stronger curved specimens with a radius of curvature down to one meter or even below. The size of specimen is sometimes up to one meter and the form has to be known with nanometer uncertainty. Moreover, the desired lateral resolution is sometimes smaller than one millimeter. The realization of a form measuring system combining high lateral resolution, a large measurement range and low measurement uncertainty requires sophisticated measurement principles. A measurement principle suitable for this task is presented which uses a combination of multiple distance sensors and an angular sensor, and exemplary measurements for stronger curved surfaces are shown. As multiple distance sensor an interferometer is used. Exemplary measurements are shown and the limitations of the interferometer as multiple distance sensor are discussed.

Citation Download Citation

Michael Schulz and Ralf D. Geckeler "Scanning form measurement for curved surfaces", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 592106 (15 September 2005); https://doi.org/10.1117/12.614790

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